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Air Resources Board (ARB) staff has consulted with the U.S.
Environmental Protection Agency (U.S. EPA) regarding the
Intergovernmental Panel on Climate Change (IPCC) Tier 2b
methodology for estimating fluorinated gas emissions. Upon
review, U.S. EPA clarified the following statement: “Emissions
resulting from the use of a specific fluorinated gas (FCi)
consist of emissions of FCi itself plus emissions of CF4, C2F6,
CHF3, and C3F8 created as by-products during use of FCi.” (See
page 6.11 of the 2006 IPCC Guidelines for National Greenhouse Gas
Inventories report).  Per U.S. EPA, the emissions of fluorinated
greenhouse gases that are generated as by-products during
electronics manufacturing processes should be reported as the
gases that they are.  The by-products are chemically different
from the input gases and should be reported as the gases that
they are.  An example is by-product emissions of CF4 from the use
of NF3 as an input gas.  The CF4 emissions should be included in
the total emissions of CF4 rather than in the total emissions of
NF3.  

Previously in the Semiconductor Emissions Estimate Calculator
(tool), the by-product emissions were attributed to the emissions
of the fluorinated gas used to form the by-products.  Since we
have clarified the methodology in calculating emissions and
by-product emissions as discussed above, we have updated the tool
to reflect this change.  

During the initial development of the regulation, we used the
tool to determine emission results for the semiconductor sector. 
This change in the emission calculations did not impact the 2006
survey conclusion used to develop the regulation.  

Please refer to section IIIb of the “InfoFormula” tab of the tool
for an example of the IPCC Tier 2b and by-product emission
calculations.  The updated tool is available here:

http://www.arb.ca.gov/cc/semiconductors/calculator/calculator.htm

The tool is designed to assist in benchmarking and calculating
greenhouse gas emissions from semiconductor operations using the
2006 IPCC Tier 2b methodology.  The tool was developed in
response to stakeholder requests.  Its use is voluntary.  

The purpose of the semiconductor regulation is to reduce
greenhouse gas emissions from semiconductor operations pursuant
to the California Global Warming Solutions Act of 2006 (Health &
Safety Code, sections 38500 et. seq.).  This regulation was voted
on by the Board on February 26, 2009, and the California Office
of Administrative Law approved and filed the regulation with the
Secretary of State on December 14, 2009.  The regulation became
effective January 1, 2010.  

For more information regarding the semiconductor regulation and
the semiconductor program, please visit: 
http://www.arb.ca.gov/cc/semiconductors/semiconductors.htm

If you have any questions concerning the tool, please contact Ms.
Lynn Yeung, Air Pollution Specialist, at lynn.yeung@arb.ca.gov or
(916) 324-0210.

California is in a drought emergency.
Visit www.SaveOurH2O.org for water conservation tips.





California is in a drought emergency.
Visit www.SaveOurH2O.org for water conservation tips.