Last reviewed on April 15, 2014 at 10:09

Documentation of California's Greenhouse Gas Inventory (7th Edition - Last updated on 03-24-2014)

♦ Category: Industrial Processes and Product Use

IPCC: 2E - Electronics Industry
Sector: Industrial : Manufacturing : Electric & Electronic Equip. : Semiconductors & Related Products

♦ Activity: Semiconductor manufacture -

♦ Greenhouse gas: Nitrogen trifluoride ( NF3 )

► Year 2000 —

● Greenhouse gas emission estimate —

Amount: 0.310 tonne of NF3 Emitted (5,327 tonnes CO2 Eq.)
Basis: Calculation
Calculation: [US emissions from semiconductor manufacture] *[Ratio of 2006 California survey to US emissions]
Reference: ARB (2014). Technical support document on GHG inventory methodologies for the 2000-2012 inventory. See Discussion of emissions from semiconductor manufacturing. Specific questions may be directed to ARB staff, see: /cc/inventory/contacts.htm

● Activity level used in calculations —

Activity:
Basis: None
Reference: Not Applicable.

● Parameters and Constants used in calculations —

Parameter: Ratio of 2006 California survey to US emissions = 0.0298
Reference: ARB (2014). Technical support document on GHG inventory methodologies for the 2000-2012 inventory. See Discussion of emissions from semiconductor manufacturing. Specific questions may be directed to ARB staff, see: /cc/inventory/contacts.htm
Parameter: US emissions from semiconductor manufacture = 10,375,662 g (i.e. 10.38 tonnes)
Reference: USEPA (2014). DRAFT Inventory of U.S. Greenhouse Gas Emissions and Sinks, Table 4-96, U.S. Environmental Protection Agency EPA 430-R-13-001. http://www.epa.gov/climatechange/emissions/usinventoryreport.html

● Greenhouse gas emitted per unit activity —

Amount: Not Applicable
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