Last reviewed on 10-02-2020

Documentation of California's Greenhouse Gas Inventory (13th Edition - Last updated on 10-15-2020)

♦ Category: Industrial Processes and Product Use

IPCC: 2E - Electronics Industry
Sector: Industrial : Manufacturing : Electric & Electronic Equip. : Semiconductors & Related Products

♦ Activity: Semiconductor manufacture -

♦ Greenhouse gas: Sulphur hexafluoride ( SF6 )

► Year 2006 —

● Greenhouse gas emission estimate —

Amount: 1.51 tonne of SF6 Emitted (34,321 tonnes CO2 Eq.)
Basis: Data
Calculation: 2006 survey of emissions from semiconductor manufacturing conducted by ARB
Reference: ARB (2009). Initial Statement of Reasons for Proposed Regulation to Reduce Greenhouse Gas Emissions from Semiconductor Operations. California Air Resources Board, Stationary Source Division, January 2009. #/regact/2009/semi2009/semi2009.htm

● Activity level used in calculations —

Basis: None
Reference: Not Applicable.

● Parameters and Constants used in calculations —

Parameter: US emissions from semiconductor manufacture = 30,701,754 g (i.e. 30.7 tonnes)
Reference: USEPA (2015). Inventory of U.S. Greenhouse Gas Emissions and Sinks: 1990-2013. U.S. Environmental Protection Agency. Tables 4-91 and 4-92 #
Constant: Global warming potential of SF6 = 22800
Reference: IPCC (2007). Climate Change 2007: The Physical Science Basis. Contribution of Working Group I to the Fourth Assessment Report of the Intergovernmental Panel on Climate Change. Solomon S., Qin D., Manning M., Chen Z., Marquis M., Averyt K.B., Tignor M., and Miller H.L. (eds.). #

● Greenhouse gas emitted per unit activity (derived from values listed above) —

Amount: Not Applicable