Last reviewed on 12-01-2023

Documentation of California's Greenhouse Gas Inventory (2023 Edition - Last updated on 12-1-2023)

♦ Category: Industrial Processes and Product Use

IPCC: 2E - Electronics Industry
Sector: Industrial : Manufacturing : Electric & Electronic Equip. : Semiconductors & Related Products

♦ Activity: Semiconductor manufacture -

♦ Greenhouse gas: Nitrogen trifluoride ( NF3 )

Back to Index Year 2000 Previous year Next year Year 2021

► Year 2006 —

● Greenhouse gas emission estimate —

Amount: 0.672 tonne of NF3 Emitted (11,554 tonnes CO2 Eq.)
Basis: Data
Calculation: 2006 survey of emissions from semiconductor manufacturing conducted by ARB
Reference: CARB (2009). Initial Statement of Reasons for Proposed Regulation to Reduce Greenhouse Gas Emissions from Semiconductor Operations. California Air Resources Board, Stationary Source Division, January 2009. http://www.arb.ca.gov/regact/2009/semi2009/semi2009.htm

● Activity level used in calculations —

Activity:
Basis: None
Reference: Not Applicable.

● Parameters and Constants used in calculations —

Parameter: Ratio of 2006 California survey to US emissions = 0.0179
Reference: CARB (2016). Technical support document on GHG inventory methodologies for the 2000-2014 inventory. See Discussion of emissions from semiconductor manufacturing available at: https://ww3.arb.ca.gov/cc/inventory/pubs/reports/2000_2014/ghg_inventory_00-14_technical_support_document.pdf
Parameter: US emissions from semiconductor manufacture = 37,600,000 g (i.e. 37.6 tonnes)
Reference: USEPA (2023). Inventory of U.S. Greenhouse Gas Emissions and Sinks: 1990-2021. U.S. Environmental Protection Agency. Table 4-110 http://www.epa.gov/climatechange/emissions/usinventoryreport.html

● Greenhouse gas emitted per unit activity (derived from values listed above) —

Amount: Not Applicable